Thermal scanning probe lithography has been gaining in significance in nanolithography, helping users create ultra-high resolution structures on novel materials. In this collaboration, throughput of the method will be scaled up by parallelizing the patterning using 10 probe tips simultaneously.
Thermal scanning probe lithography has been gaining in significance in nanolithography, helping users create ultra-high resolution structures on novel materials. In this collaboration, throughput of the method will be scaled up by parallelizing the patterning using 10 probe tips simultaneously.